DIE EJECTING APPARATUS
申请(专利)号： KR20190003375
专利号： KR102141201B1 主分类号： H01L21/67
申请权利人： ??? ????
公开国代码： KR 优先权国家： KR
摘 要：
A die ejecting device is disclosed. The apparatus is configured with a hood
formed of a light-transmitting material and having vacuum holes for vacuum adsorbing a lower surface of a dicing tape, disposed within the hood, and
movable in a vertical direction through an upper portion of the hood, An ejector unit for separating the die on the dicing tape from the dicing tape, an ejector body coupled to a lower portion of the hood and having a tube shape, and irradiating ultraviolet light through the upper portion of the hood to dicing the tape and the And an ultraviolet illumination unit for reducing adhesion between dies. 主权项：
申请日： %Y-%m-%d 公开公告日： %Y-%m-%d
分类号： H01L21/67;
H01L21/677; H01L21/683 发明设计人： ???;
???; ???; ??? 申请国代码： KR
优先权： 20190110 KR
20190003375
摘 要 附 图：
权 利 要 求 说 明 书
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说 明 书
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DIE EJECTING APPARATUS
