Being the
申请(专利)号: JP20080332476
专利号: JP5008651B2 主分类号: G11B5/84
申请日: 2008-12-26 公开公告日: 2012-08-22
分类号: G11B5/84;
B24B37/26 发明设计人: 山本 恵司
申请权利人: ニッタ?ハース株
式会社 公开国代码: JP 优先权国家: JP
申请国代码: JP
优先权: 20081226 JP
2008332476
摘 要 附 图:
摘 要:
PROBLEM TO BE SOLVED: To improve a polishing rate while preferably maintaining a roll of an object to be polished.;SOLUTION: A polishing cloth includes a base layer 2 and a porous
polishing layer 3 formed on the base layer 2. The specific surface area of the polishing layer 3 is 0.5-1.0
m2/g. This makes the surface of the polishing layer
appropriately rough so that abrasive
grains are readily attached to the surface, thereby improving the polishing rate while preferably maintaining the roll of the polished object, and shortening a time period required for starting up auxiliary polishing.;COPYRIGHT: (C)2010,JPO&INPIT 主权项:
基材層と前記基材層上に形成された多孔質の研磨層とを備える研磨布であって、 前記研磨層の比表面積が0.5~1.0m2/gであることを特徴とする研磨布。
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权 利 要 求 说 明 书
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