METHOD AND EQUIPMENT FOR ANALYZING SURFACE

METHOD AND EQUIPMENT FOR ANALYZING SURFACE

申请(专利)号： JP19950292465

专利号： JPH09133643A 主分类号： G01N23/227 申请权利人： HITACHI LTD

公开国代码： JP 优先权国家： JP

摘 要：

PROBLEM TO BE SOLVED: To

determine the distribution of bonding state of a target element in the depth direction with high accuracy by scanning the incident light energy while fixing the

kinetic energy of detected photoelectron, observing a plurality of kinetic energies of photoelectron from the photoelectron spectrum to obtain the intensity of

photoelectron, and then subjecting the intensity of photoelectron to integral

transformation. ;SOLUTION: A sample 4 on a sample stage 5 is irradiated with the light from a light source 1 subjected to monochromatization through a spectrometer 2 and photoelectrons emitted from the surface thereof are passed through an electron energy

analyzer 6 thus detecting photoelectrons having a specified kinetic energy. The incident light energy is scanned by controlling the spectrometer 2 and the photoelectron spectrum of a target

element under bonded state is measured.

申请日： 1995-11-10 公开公告日： 1997-05-20

分类号： G01N23/227 发明设计人： HASEGAWA

MASAKI; YAMAMOTO KENICHI;

NINOMIYA TAKESHI 申请国代码： JP

优先权： 19951110 JP

29246595

摘 要 附 图：

At the same time, the intensity of incident light is measured by an incident light intensity monitor 8 and stored in a storing/processing unit 9. The unit 9 extracts the peak intensity of

photoelectron from the spectrum and stores the peak intensity. Kinetic energy of photoelectron is varied a plurality of times by controlling the analyzer 6 and the intensity of each photoelectron is stored in the unit 9. The unit 9 converts the kinetic energy into the escape depth of photoelectron and determined the distribution of bonding state of a target element in the depth direction through integral transformation.;COPYRIGHT: (C)1997,JPO 主权项：

【請求項1】試料に光を照射して放出される光電子を観測する表面分析方法において、入射光のエネルギを変化させながら一定運動エネルギの光電子を検出して得られる光電子スペクトルを、複数の光電子運動エネルギに対

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