精编【安全生产管理】世界半导体生产机台安全设计验收标准英文

【安全生产管理】世界半导体生产机台安全设计验收标准英

文

xxxx年xx月xx日 xxxxxxxx集团企业有限公司

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Global Semiconductor Safety Services, LLC SEMI S2-93A Product Safety Assessment

Final Report

世界半导体生产机台安全设计验收标准

Applied Materials

Chemical Mechanical Polishing System

Model: Mirra Trak

CMP工艺应用材料

Prepared for:

Applied Materials 3111 Coronado Drive Santa Clara, CA 95054

Prepared by:

Global Semiconductor Safety Services, LLC

1313 Geneva Drive Sunnyvale, CA 94089 GS3 Job No. 980029 GS3 Document No. 980029F2