亚波长金属偏振光栅设计与分析
康宁;唐军;李大林;陈萌;杨江涛;郭浩;刘俊
【期刊名称】《传感器与微系统》 【年(卷),期】2015(000)002
【摘要】In order to resolve atmospheric optics polarization pattern for accurate navigation,a sub-wavelength metallic polarizer is designed based on rigorous coupled-wave analysis( RCWA),which is suitable for structure of compound eye. Aiming at single and bi-layer metallic grating with different period,duty cycle and metal layer thickness are simultated and analyzed,actual technological level and cost into consideration,bi-layer metallic grating with period of 200 nm,duty cycle of 0. 5 and metal layer thickness of 100 nm is chosen for polarizer of compound eye,TM polarized light transmittance of blue light in central band 450 nm of the designed bi-layer metallic grating achieve 45 %,and the extinction ratio achieve 450,satisfy requirements for polarization navigation.%为解算大气偏振态来实现精确导航，基于严格耦合波分析，设计了适用于复眼结构的亚波长金属偏振器。针对不同周期、占空比和金属层厚度的单层、双层金属光栅进行了仿真分析，结合实际工艺水平和加工成本，最后选定周期200 nm，占空比0.5，深度200 nm，金属层厚度100 nm的双层金属光栅作为复眼结构的检偏器，设计的双层金属光栅在中心波段450 nm的蓝光（400～500 nm）TM偏振光透射率为45%，消光比达到450，达到用于偏振导航的要求。
亚波长金属偏振光栅设计与分析
