Measurements of argon metastable density using the tunable diode laser absorption spectros

Measurements of argon metastable density using the tunable diode laser absorption spectroscopy in

Ar and Ar/O2

Dao-Man Han;Yong-Xin Liu;Fei Gao;Wen-Yao Liu;Jun Xu;You-Nian Wang

【期刊名称】《中国物理：英文版》 【年(卷),期】2018(027)006

【摘要】Densities of Ar metastable states 1s5 and 1s3 are measured by using the tunable diode laser absorption spectroscopy (TDLAS) in Ar and Ar/O2 mixture dual-frequency capacitively coupled plasma (DF-CCP).We investigate the effects of high-frequency (HF,60 MHz) power,low-frequency (LF,2 MHz) power,and working pressure on the density of Ar metastable states for three different gas components (0％,5％,and 10％ oxygen mixed in argon).The dependence of Ar metastable state density on the oxygen content is also studied at different working pressures.It is found that densities of Ar metastable states in discharges with different gas components exhibit different behaviors as HF power increases.With the increase of HF power,the metastable density increases rapidly at the initial stage,and then tends to be saturated at a higher HF power.With a small fraction (5％ or 10％) of oxygen added in argon plasma,a similar change of the Ar metastable density with HF power can be observed,but the metastable density is saturated at a higher HF power than in the pure argon discharge.In the