Apparatus for manufacturing semiconductor unit
申请(专利)号： KR20070067113
专利号： KR100888044B1 主分类号： H01L21/02 申请权利人：
申请日： 2007-07-04 公开公告日： 2009-03-10
分类号： H01L21/02;
H01L21/00 发明设计人： ???;
??? 申请国代码： KR
优先权： 20070704 KR
20070067113
摘 要 附 图：
公开国代码： KR 优先权国家： KR
摘 要：
An apparatus for manufacturing semiconductor device including processing part, separator, and
exhausting part is provided to prevent lifetime reduction of the apparatus and exhaustion of toxic material. An apparatus for manufacturing semiconductor device includes a processing part(100), a separator(200), and an exhausting
part(300). The processing part processes a semiconductor device using processing liquid. The separator separates a mist from a gas including the mist exhausted in the processing part, and includes a filter(210) and a liquid supplying part. The filter filters the gas including the mist. The liquid supplying part supplies a liquid which dilutes the mist. The exhausting part is connected to the separator, and exhausts the gas to outside. 主权项：
??? ??? ????? ???? ???;/n?? ????? ???? ??? ??? ??? ???? ???? ????? ???? ?????
?????(separator)??, ??
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Apparatus for manufacturing semiconductor unit
