355 nm 紫外激光抛光 Al2O3陶瓷工艺的研究

355 nm 紫外激光抛光 Al2O3陶瓷工艺的研究

周敏;魏昕;谢小柱;胡伟

【期刊名称】《激光技术》 【年(卷),期】2014(000)004

【摘要】Al2 O3 ceramic polished with 355nm ultraviolet laser could effectively reduce the heat affected zone in processing and prevent the formation of microcracks .In order to find the effects of different parameters ( laser energy intensity ,laser scanning velocity , laser scanning interval ) on the surface roughness and the surface quality , a series of experiments were carried out with a single factor of the 355nm ultraviolet laser affecting the polishing result .The optimal technology parameters were obtained at last .The results show that relatively small surface roughness can be obtained under the conditions of 6J/cm2 laser fluence,60mm/s laser scanning velocity and 2μm laser scanning interval .The study is helpful for getting low roughness and high quality of Al 2 O3 ceramic .%紫外激光抛光Al2 O3陶瓷可以有效地降低加工中的热影响区、防止微裂纹的产生。为了得到不同激光工艺参量（激光能量密度、扫描速率、扫描间隔）对Al2 O3陶瓷抛光表面粗糙度的影响规律，采用单因素实验方法进行了355nm紫外激光抛光Al2 O3陶瓷的工艺实验，获得了最优的工艺参量范围。结果表明，当激光能量密度为6J/cm2、扫描间隔为2μm、扫描速率为60mm/s时，抛光后分别获得了较小的表面粗糙度值。这一结果对获得的低粗糙度、高质量的Al2 O3陶瓷抛光表面具有指导意义。