基于热效应飞秒激光诱导 LiNbO3表面结构的研究
冯杰;范宗学;单常亮;魏欣芮;吴琴;杨永佳;周自刚
【期刊名称】《激光技术》 【年(卷),期】2015(000)006
【摘要】In order to study thermal effect of femtosecond laser on the surface of LiNbO 3 crystal, LiNbO3 crystal surface was etched by tightly-focused femtosecond laser pulses with repetition rate of 25MHz, pulse duration of 100fs and average output power of 500mW.A theoretical thermal diffusion model was built to simulate the temperature filed distribution of the area etched by laser pulses with repetition rate of 25MHz, and the morphology of the etched area was analyzed by a scanning electron microscope .There were three regions with different sizes and densities from the inside to the outside of the etched area , and the central region was ablated by high temperature and was accompanied with the appearance of cracks .Relative contents of Nb and O at the three regions were measured by using energy dispersive spectroscopy and were analyzed with temperature field distribution and morphology .The result shows that Nb and O elements spread out under the drive of temperature field , and relative contents of Nb and O have an important influence on surface structure of etch area .The results are useful for mechanism research of the interaction between high repetition rate femtosecond laser and LiNbO 3 crystal .%为了研究飞
基于热效应飞秒激光诱导 LiNbO3表面结构的研究
