多晶硅氢化还原工艺电气优化探析
张尚旻
【期刊名称】《电子测试》 【年(卷),期】2015(000)007
【摘要】Large scale production of polysilicon is an emerging industry,which is an important part of the whole process of hydrogenation reduction method based on improved Siemens polysilicon production,directly determines the product quality and production efficiency,is the largest part of the polysilicon production power.Therefore,has the extremely vital significance to study the installation and use of electrical equipment for hydrogenation reduction.Based on a project of hydrogenation reduction of electrical equipment grounding protection,phase equilibrium of the case as the starting point,to some common problems of.%多晶硅的规模化生产是个新兴行业，其中氢化还原工艺是整个基于改良西门子法生产多晶硅的重要环节，直接决定产品质量和产品的生产效率，是整个多晶硅生产电耗最大的环节。因此，对氢化还原电气设备的安装及使用的研究有着极其重要的意义。本文以某项目氢化还原电气设备接地保护、三相平衡等案例为立足点，对常见的一些问题进行了探析。
【总页数】2页(160-161) 【关键词】多晶硅;三相平衡;UPS 【作者】张尚旻
多晶硅氢化还原工艺电气优化探析
