Scratch Drive Actuator
(SDA)
?SDA operation
?1) Applied voltage bends SDA downward
?2) When released, SDA returns to original shape
?3) Reapplying voltage causes SDA to move a distance ‘dx’
Caveat: sometimes they go backward!
?SDA application
Electrostatic Motors
Torque Motor 的原理
?典型的电极数为： 定子12个，转子8个 ?三相驱动
Ground V A’ W 3W/2 B’ B C G
C’ D V
A W 2W/3 G
固定
MEMS致动器原理 - 图文
ScratchDriveActuator(SDA)?SDAoperation?1)AppliedvoltagebendsSDAdownward?2)Whenreleased,SDAreturnstooriginalshape?3)Reapplyingvol
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