William Tang, Ph.D. EECS Dept., 1990
Formulae
?电场能量：
?静电力：
C
?Energy must include capacitance between the stator and the rotor and the underlying ground plane, which is typically connected at the rotor voltage.
w = t = g = z0 = 2μm Vr =0V
C’= dC/dx
Comb Drive Failure Modes
Example
释放应力
MEMS致动器原理 - 图文
WilliamTang,Ph.D.EECSDept.,1990Formulae?电场能量：?静电力：C?Energymustincludecapacitancebetweenthestatorandtherotorandtheunderlyingground
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