多维栅格标准样板的制备与表征
雷李华;蔡潇雨;魏佳斯;孟凡矫;傅云霞;张馨尹;李源
【期刊名称】《红外与激光工程》 【年(卷),期】2019(048)005
【摘要】As an important part of traceability chain for micro-nano geometric quantity,the grid standard template is the basic guarantee for the development of nano-technology.In order to achieve the rapid tracking and calibration of the effective area in the micro-nano grid structure,a tracking structure was designed to quickly locate the effective measurement area and orthogonally scanning direction.In order to meet the calibration requirements of different accuracy and size range,the grid standard template with multi-dimension and multi-parameter structure was designed and integrated in the same substrate.The measurement result error was analyzed and evaluated by the metrological nano measuring machine (NMM),which could characterize the traceability of grid standard template.The experimental results
show
that
the
grid
standard
template
has
good
uniformity,accuracy and stability,and it is verified that the developed grid standard template can be used as an ideal reference standard for nano geometry traceability system.%栅格标准样板作为微纳米几何量量值溯源体系中的重要组成部分,是纳米科技发展的基础保障.为了实现微纳米尺寸栅格结构有效区域的快速循迹与校准,文中设计了一种便于快速定位有效区域并栅
多维栅格标准样板的制备与表征
