MOEMS陀螺的空间谐振腔微镜调节新方法
刘惠兰;王勇;唐依创;冯丽爽
【期刊名称】《中国惯性技术学报》 【年(卷),期】2013(000)004
【摘要】空间谐振腔是空间谐振式MOEMS陀螺的核心敏感器件，构成谐振腔的微镜的调节是实现谐振腔的关键。提出了一种基于耦合原理调节空间谐振腔竖直微镜的方法。针对使用微加工工艺制作的竖直微镜，运用耦合原理将以往避免的调节耦合量作为有益量完成对微镜的空间调节。通过相应的调节基本结构及调节方法，对由相应的结构构成的微谐振腔分别进行了MATLAB及ANSYS仿真和分析。结果证实了此调节方法的可行性，基于该调节方法和调节结构完全能够实现微镜的高精度空间调节，对MOEMS陀螺的空间谐振腔的调整具有可靠的调节稳定性及更高的集成度，为空间谐振式MOEMS陀螺的实现提供一条新的路线。%Spatial resonator is the key element of MOEMS gyroscope. Adjustment of the micro-mirrors of spatial resonator is important for realization of the resonator. An adjustment method based on coupling theory for the vertical micro-mirrors in the spatial resonator was presented. For the production of the vertical micro-mirror by micro-processing technology, the principle of the regulation based on coupling was used to complete the space-conditioning as a useful means, rather than avoiding the coupling volume. The basic structure of regulation and the method of implementation were introduced, and the spatial resonator made up of this structure was simulated and analyzed
MOEMS陀螺的空间谐振腔微镜调节新方法
