MEMS传感器现状及应用

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MEMS传感器现状及应用

摘要: MEMS传感器种类繁多,开展迅猛,应用广泛。首先,简单介绍了MEMS传感器的分类和典型应用。其次,对MEMS压力传感器、加速度计和陀螺仪三种最典型的MEMS传感器进展了详细阐述,包括类别、技术现状和性能指标、最新研究进展、产品,及应用情况。介绍MEMS压力传感器时,给出了国内外采用新型材料制作用于极端环境下压力传感器的研究情况。最后,从新材料、加工和组装技术方面对MEMS传感器的开展趋势进展了展望。

关键词: 微电子机械系统(MEMS);传感器;加速度计;陀螺仪;压力传感器

Current Status and Applications of MEMS Sensors

Abstract: MEMS sensors feature great varieties, rapid development and wide applications. Firstly,the categories and typical applications of MEMS sensors are introduced briefly. Then three typi-cal MEMS sensors, i. e. the pressure sensor, accelerometer and gyroscope are illustrated in de-tail,including the subdivision, current technical capability and performance index, latest researchprogress, products and their applications. Besides that, the research status of the MEMS pres-sure sensor using new materials for the extreme environment at home and abroad is presented.Finally, development trends of MEMS sensors are predicted in terms of new materials, proces-sing and assembling technology.

Key words: microelectromechanical system(MEMS); sensor; accelerometer; gyroscope; pres-sure sensor

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目录

引言1

1 MEMS传感器分类及典型应用1

1.1 MEMS传感器分类1 1.2 MEMS传感器应用1

微机械压力传感器1 微加速度传感器2 微机械陀螺2

2 MEMS 传感器的开展2

2.1缓慢成长期2 2.2缓慢成长期2 2.3快速成长期3 3 MEMS传感器的开展趋势3 4总结3 参考文献3

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