MEMS矢量水听器灵敏度自动测试系统设计

MEMS矢量水听器灵敏度自动测试系统设计

杨晟辉;张国军;韩建军;丁俊文;曾瑞;尚珍珍

【期刊名称】《强激光与粒子束》 【年(卷),期】2017(029)004

【摘要】Due to the single,heavy and time-consuming testing task and the uncertain errors of manual operation of MEMS vector hydrophone sensitivity

testing,this

paper

uses

micro-controller

AD9850,AD8599,PGA205,MK60DN512ZVLQ110

chips,to design an auto testing device of MEMS vector hydrophone sensitivity based on the analysis of the testing principle of vector hydrophone source,weak

sensitivity.This signal

device

integrates

signal

excitation

and

detection,signal conditioning,sampling

transmission module.It shrinks testing instrument,integrates multi module and connects PC to make quick and timely calibration testing of vector hydrophone sensitivity,which not only saves testing time greatly,but also can optimize the hydrophone rapidly.It has the advantages of small size,lightweight and simple testing,which brings convenience to field testing and accelerate engineering application of MEMS vector hydrophone.%针对微机电系统(MEMS)矢量水听器声压灵敏度测试中出现的测试步骤单一、测试任务繁重且耗时多,同时手动测量存在不确定的操作误差等问题,在分析矢量水听器灵敏度测试原理和测试过程的基础上,采用AD9850,AD8599,PGA205、单片机MK60DN512ZVLQ110等芯片,设计了集