半导体PVD金属化(20240912144305)

—PVD

2014.08.18

Metalization

WHAT IS SPUTTERING?

In cident ion

(Ar)

Material to deposit A 1 6 H THIN FILM ?「 SUBSTRATE

macroscopic microscopic

■ Definition: To dislodge (atoms) from the surface of materials by

collision with high energy particles; also, to deposit by such a film. (according to Webster's dictionary)

Schematic of DC sputtering

Ar

Schematic of DC sputtering

Schematic of DC sputtering

Ar

I

I