cassette for carrying probenbeh?ltern different diameter
and \\/ or length
申请(专利)号： DE3490478T
专利号： DE000003490478T
5 主分类号： A47B73/00 申请权利人： COULTER
ELECTRONICS, INC., HIALEAH, FLA., US
公开国代码： DE 优先权国家： US
摘 要：
A method and apparatus for fabricating a device is disclosed, which method involves a new reactive ion etching
technique. Both a high etch rate and, for example, a high etch selectivity are simultaneously achieved with the
inventive reactive ion etching technique by discharging an electrode of the reactive ion etching apparatus in
response to a preselected criterion, e.g.,
申请日： 1984-10-02 公开公告日： 1985-12-12
分类号： A47B73/00;
B01L9/06
发明设计人： WALKER, JAMES
WILLIAM;
ROTHERMEL, WILLIAM FLETCHER,
HOLLYWOOD, FLA., US;
COULTER,
WALLACE HENRY, MIAMI SPRINGS, FLA., US;
MATTHEWS, JOHN PAUL, PEMBROKE PINES, FLA., US 申请国代码： DE
优先权： 19831013 US
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摘 要 附 图：
a magnitude of a DC bias at said
electrode which equals, or exceeds, a preselected value. 主权项：
权 利 要 求 说 明 书
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cassette for carrying probenbeh
