Experimental studies of superhard materials carbon nitride CNx prepared by ion-beam synthesis method

Experimental studies of superhard materials carbon nitride CNx prepared by ion-beam

synthesis method

作者：辛火平;林成鲁;许华平;邹世昌;石晓红;吴兴龙;朱宏;P.L.FHemment;;;;;;;;; 作者机构：National Laboratory of Functional Materials for Informatics;Shanghai Institute of Metallurgy;Chinese Academy of Sciences;Shanghai 200050;China;National Laboratory for Infrared Physics;Shanghai Institute of Technical Physics;Shanghai

200083;National Laboratory of Solid State Microstructure;Nanjing University;Nanjing 210093;Ion Beam Laboratory;Shanghai Institute of Metallurgy. Chinese Academy of Sciences;Department of Electronic and Electrical Engineering;University of Surrey. Guildford;Surrey GU2 5XH. UK;

来源：中国科学 年：1996 卷：000 期：004

页码：P.404-411 页数：8 中图分类：TB39 正文语种：CHI

关键词：ion implantation C≡N covalent bond buried carbon nitride CNx 摘要：Formation of superhard materials carbon nitride CNt by using ion-beam synthesis method is reported.100-keV high-dose N+ ions were implanted into carbon thin films at different temperatures.The