溶胶-凝胶法制备K-N共掺ZnO 薄膜的结构及光学特性

溶胶-凝胶法制备K-N共掺ZnO 薄膜的结构及光学特性

张振兴;张海军;廖梦舟;周华;谢二庆;潘孝军

【期刊名称】《功能材料》 【年(卷),期】2013(000)022

【摘要】采用溶胶-凝胶法在 Si(100)衬底上生长了K与N共掺的ZnO 薄膜，并用 X射线衍射仪、扫描电子显微镜、荧光分光光度计、紫外-可见分光光度计对ZnO 薄膜样品的结构和光学特性进行了研究。结果表明，溶胶-凝胶法制备的 ZnO 薄膜为六方纤锌矿结构。随着K掺杂浓度的增大，薄膜的结晶性变好，组成薄膜的颗粒变大，并表现出c 轴择优生长特性，同时掺杂导致的氧空位缺陷也在增加，使得绿光发射增强，薄膜的光学带隙先增后减。%The K-N co-doped ZnO films were prepared on Si(100)substrates by sol-gel method.The structure and the optical properties of the ZnO films were investigated

by

X-ray

diffraction,scanning and

ultraviolet

electron

and

microsco-visible

py,photoluminescence

spectrophotometer.The results show that the films exhibit a hexagonal structure.As the concentration of potassium increases,the crystallinity of the films was improved and the grain size increases,showing a preferential growth along c axis.Meanwhile,the increased concentration of K-N doping results in increased oxygen vacancies,enhanced green photoluminescence,and the optical band-gap that increases first and then decreases.

【总页数】4页(3301-3304)