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Sensitive material feeder

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Sensitive material feeder

申请(专利)号: JP19970080293

专利号: JP3476173B2 主分类号: B65H5/02

申请权利人: 大日本スクリーン

製造株式会社 公开国代码: JP 优先权国家: JP

摘 要:

PROBLEM TO BE SOLVED: To provide a material feeding device by which

miniaturization of an exposure device can be realized as a whole by suppressing generation of air bearing effect when a sensitive material is fed to a table in the exposure device and effectively using a dead space in the device. ;SOLUTION: A discharging roller 14h discharging a

sensitive material 11 is set in the position higher than the upper face of a table 22. Therefore, the sensitive material 11 discharged from the discharging roller 14h is fed onto the upper face of the table 22 at a certain angle. In this way, an air layer generated between the sensitive material 11 and the upper face of the table 22 is blown out sequently from one edge side of the sensitive material 11. Therefore, an air layer generated

between the sensitive material 11 and the upper face of the table 22 can be

reduced, and the sensitive material 11

申请日: 1997-03-31 公开公告日: 2003-12-10

分类号: B65H5/02;

B65H3/08; B65H29/16; B65H29/20; G03B27/46 发明设计人: 加藤 博己

申请国代码: JP

优先权: 19970331 JP

8029397

摘 要 附 图:

can be prevented from sliding in the lateral direction on the table 22, that is, bearing effect can be

prevented.;COPYRIGHT: (C)1998,JPO 主权项:

【請求項1】 感光材料を、露光装置のテーブルの上面に供給する感光材料供給装置であって、

前記感光材料を格納するカセットケースと、

前記カセットケースに格納された前記感光材料を吸着し、前記感光材料を前

权 利 要 求 说 明 书

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Sensitive material feeder

Sensitivematerialfeeder申请(专利)号:JP19970080293专利号:JP3476173B2主分类号:B65H5/02申请权利人:大日本スクリーン製造株式会社公开国代码:JP优先权国家:JP摘要:PROBLEMTOBESOLVED:Topr
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